MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering Review

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MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering ReviewNew in this edition are micro-fabricated gyroscopes and microphone elements, the latter of which is already appearing in consumer devices. The second edition updates modernize what was already an excellent book.
I'd recommend that if you're not sure about spending the money on the book that you use amazon's search inside this book and take a bit of a look. Much as you'd do in a bookstore, thumb through, search for a couple of items of interest, that sort of thing.MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering Overview

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